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Vol: 55(69) No: 1 / March 2010 Design and calibration of a low cost measuring probe Gyula Hermann Department of Intelligent Engineering Systems, Budapest Tech, Faculty of Informatics, Bécsi út 96B, 1034 Budapest, Hungary, phone: (+36-1) 666-5535, e-mail: hermann.gyula@nik.bmf.hu Keywords: measuring probe, submicron resolution, optical displacement sensing, measuring uncertainty Abstract With the appearance of micromachined mechanical elements and nanotechnology, increased demand can be observed for coordinate measuring systems having submicron accuracy. Probes are major components of such a coordinate measuring machine. They contribute to a large extend to measurement uncertainty of the CMM. In this paper a new design is presented in which the moving element of the probe head consists of the stylus fixed to a diaphragma flexure, made of berillium-copper foil with, a small aluminium enhanced mirrors at the centre. The displacement of the probe tip is determined from the displacement and the rotations of the mirrors measured by a modified optical pick-up and by two lasers focused on four quadrant diodes. In order to test probes a calibration system with ~40 nm measuring uncertainty was designed. A high precision three-axis translation stage, with a working range of 100 x 100 x 100 μm, moves the probe stylus and the position of the stage is determined by three mutually-orthogonal plane mirror laser interferometer transducers having 1 nm resolution. References [1] S. Awtar “Synthesis and Analysis of Parallel Kinematic XY Flexure Mechanisms” PhD. Thesis, MIT, 2003. [2] Chi-Liang Chu, Chen-Yu Chiu „Development of a low-cost nanoscale touch trigger probe based on two commercial DVD pick-up heads“ Meas. Sci. and Techol. 18(2007) 1831-1842 [3] K.C. Fan, M.J. Chen, W.M. Huang “A Six-Degree-of Freedom Measurement System for the Motion Accuracy of Linear Stages” Int. J. Mach. Tools Manufact Vol. 38. No 3 pp.155-164, 1998 [4] A. Küng, F. Meli, R. Thalmann Ultraprecision micro-CMM using a low force 3D touch probe” Measurement Science and Technology 18 (2007) pp. 319–327 [5] F. Meli, M. Fracheboud, S. Bottinelli, M. Bieri, R. Thalmann, J-M. Breguet, R. Clavel “High precisision, low force 3D touch probe for measurements on small objects” Euspen Int. Topical Conference, Aachen , German y, May 2003. [6] W.O. Pril „Development of High Precision Mechanical Probes for Coordinate Measuring Machines” PhD. Thesis TU Eindhoven 2002 [7] J.S. Przemieniecki “Theory of matrix structural analysis” McGraw-Hill 1968 [8] A. Sohn, T.A. Dow, E.A. Marino “A new design for a three-dimensional measuring probe” [9] W.P. van Vliet, P.H.J. Schellekens “Accuracy limitations of fast mechanical probing” Annals of the CIRP 45(1) 483-487 [10] W.P. van Vliet, P.H.J. Schellekens “Development of a fast mechanical probe for coordinate measuring machines” Precision Engineering Vol. 22 (1998) pp. :141–152 [11] A. Weckenmann, T. Estler, G. Peggs, D. McMurtry “Probing Systems in Dimensional Metrology” Annals of the CIRP [12] A. Weckenmann, G. Peggs, J. Hoffmann “Probing systems for dimensional micro- and nano-metrology” Measurement Science and Technology 17 (2006) pp. 504–509. |